高溫爐管-Heater element for Diffusion / Atmospheric / CVD Furnace
Refractoies
Ceramic Fiber / Hard Board
Operating temperature
＜1250℃
Temperature Rise Speed
10~15℃/min
Flat Zone length
>1000mm (± 1℃ at 1200℃)
Heater Element：Pyromax PMD / Kanthal APM
Material：Fe-Cr-Al
Max. service temperature：1425℃
Material ：Al2O3、SiO2
1300℃-24Hr Linear Shrinkage(%)：0.3
高溫爐管製造流程
